Corrosion behaviour of monocrystalline titanium nitride

The corrosion behaviour of monocrystalline and highly textured TiN films deposited onto single crystalline MgO has been investigated. It was found that films with high defect concentrations and elements of polycrystallinity had a reduced corrosion resistance. These films had low corrosion potentials and high critical and passive current densities. For high quality films the [110]- and [111]-orientations generally displayed better corrosion properties than films with [100]-orientation. Corrosion had different effects on films of different orientations: On [100]-oriented films loose rectangularly shaped flakes were observed. [110]oriented films cracked because of compressive stresses, which in many cases caused the films to peel off during corrosion. On [111]-oriented films, finally, triangular pits were detected after corrosion. Films with high corrosion potentials had low values of critical and passive current densities. Non-destructive electrochemical analysis in combination with defect analysis can thus be used to predict the behaviour of these films on anodic polarisation.