Photo-enhanced native oxidation process for Hg0.8Cd0.2Te photoconductors

被引:13
作者
Chang, SJ
Su, YK
Juang, FS
Lin, CT
Chiang, CD
Cherng, YT
机构
[1] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[2] Natl huwei Inst TEchnol, Dept Electroopt Engn, Huwei 632, Taiwan
[3] Chung Shan Inst Sci & Technol, Lungtan 325, Taiwan
关键词
CVD; mercury compounds; noise measurement; oxidation; passivation; photoconducting devices; photodetectors;
D O I
10.1109/3.842100
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The aim of this paper is to propose an easy and reproducible vapor-phase photo surface treatment method to improve the device performance of the Hg0.8Cd0.2Te photoconductive detector. We explore the effect of surface passivation on the electrical and optical properties of the HgCdTe photoconductor, Experimental results, including surface mobility, surface carrier concentration, metal-insulator-semiconductor leakage current, 1/f noise voltage spectrum, the 1/f knee frequency, responsivity R-lambda, and specific detectivity D* for stacked photo surface treatment and ZnS or CdTe passivation layers are presented. These data are all directly related to the quality of the interface between the passivation layer and the HgCdTe substrate. We found that, by inserting a photo native oxide layer, we can shift the 1/f knee frequency, reduce the noise power spectrum, and achieve a lower surface recombination velocity S, A higher D* can also be achieved. It was also found that HgCdTe photoconductors passivated with stacked layers show improved interface properties compared to the photoconductors passivated only with a single ZnS or CdTe layer.
引用
收藏
页码:583 / 589
页数:7
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