Microstructure and optical properties of nanocrystalline ZnO and ZnO:(Li or Al) thin films

被引：81

作者：

Oral, A. Yavuz ^{[1
]}

Bahsi, Z. Banu

Aslan, A. Hasan

机构：

[1] Gebze Inst Technol, Dept Mat Sci & Engn, TR-41400 Gebze, Turkey

[2] Gebze Inst Technol, Dept Phys, TR-41400 Gebze, Turkey

来源：

APPLIED SURFACE SCIENCE | 2007年 / 253卷 / 10期

关键词：

doped zinc oxide; sol-gel; thin film; transparent-conductive oxide;

D O I：

10.1016/j.apsusc.2006.10.015

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Zinc oxide thin films (ZnO, ZnO:Li, ZnO:Al) were deposited on glass substrates by a sol-gel technique. Zinc acetate, lithium acetate, and aluminum chloride were used as metal ion sources in the precursor solutions. XRD analysis revealed that Li doped and undoped ZnO films formed single phase zincite structure in contrast to Al:ZnO films which did not fully crystallize at the annealing temperature of 550 degrees C. Crystallized films had a grain size under 50 nm and showed c-axis grain orientation. All films had a very smooth surface with RMS surface roughness values between 0.23 and 0.35 nm. Surface roughness and optical band tail values increased by Al doping. Compared to undoped ZnO films, Li doping slightly increased the optical band gap of the films. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：4593 / 4598

页数：6

共 31 条

[1] Optical constants of Zn1-xLixO films prepared by chemical bath deposition technique [J].

Abu El-Fadl, A ;

Mohamad, GA ;

Abd El-Moiz, AB ;

Rashad, M .

PHYSICA B-CONDENSED MATTER, 2005, 366 (1-4) :44-54

[2] LOW-TEMPERATURE GROWTH OF HIGHLY TRANSPARENT C-AXIS ORIENTED ZNO THIN-FILMS BY PULSED-LASER DEPOSITION [J].

AMIRHAGHI, S ;

CRACIUN, V ;

CRACIUN, D ;

ELDERS, J ;

BOYD, IW .

MICROELECTRONIC ENGINEERING, 1994, 25 (2-4) :321-326

[3] Study of optical properties of some sol-gel derived films of ZnO [J].

Bandyopadhyay, S ;

Paul, GK ;

Sen, SK .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2002, 71 (01) :103-113

[4] Sol-gel-derived c-axis oriented ZnO thin films [J].

Bao, DH ;

Gu, HS ;

Kuang, AX .

THIN SOLID FILMS, 1998, 312 (1-2) :37-39

[5] Effect of tin incorporation on physicochemical properties of ZnO films prepared by spray pyrolysis [J].

Bougrine, A ;

Addou, M ;

Kachouane, A ;

Bérnède, JC ;

Morsli, M .

MATERIALS CHEMISTRY AND PHYSICS, 2005, 91 (2-3) :247-252

[6] Influence of post-annealing temperature on properties of ZnO:Li thin films [J].

Chen, LL ;

He, HP ;

Ye, ZZ ;

Zeng, YJ ;

Lu, JG ;

Zhao, BH ;

Zhu, LP .

CHEMICAL PHYSICS LETTERS, 2006, 420 (4-6) :358-361

[7] Electrical, optical and structural properties of transparent and conducting ZnO thin films doped with Al and F by rf magnetron sputter [J].

Choi, BG ;

Kim, IH ;

Kim, DH ;

Lee, KS ;

Lee, TS ;

Cheong, B ;

Baik, YJ ;

Kim, WM .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2005, 25 (12) :2161-2165

[8] The low temperature synthesis of Al doped ZnO films on glass and polymer using magnetron co-sputtering: Working pressure effect [J].

Chung, YM ;

Moon, CS ;

Jung, MJ ;

Han, JG .

SURFACE & COATINGS TECHNOLOGY, 2005, 200 (1-4) :936-939

[9] Effects of Li and Mg doping on microstructure and properties of sol-gel ZnO thin films [J].

Fujihara, S ;

Sasaki, C ;

Kimura, T .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2001, 21 (10-11) :2109-2112

[10] Crystallization behavior and origin of c-axis orientation in sol-gel-derived ZnO:Li thin films on glass substrates [J].

Fujihara, S ;

Sasaki, C ;

Kimura, T .

APPLIED SURFACE SCIENCE, 2001, 180 (3-4) :341-350

← 1 2 3 4 →