Some peculiarities of fracture of nanocrystalline nitride and boride films

被引：23

作者：

Andrievski, RA ^{[1
]}

Kalinnikov, GV

Jauberteau, J

Bates, J

机构：

[1] Russian Acad Sci, Inst New Chem Problems, Chernogolovka 142432, Moscow Region, Russia

[2] Univ Limoges, Fac Sci, LMCTS, CNRS,URA 320, F-87060 Limoges, France

[3] Univ Loughborough, Inst Polymer Technol & Mat Engn, Loughborough LE11 3TU, Leics, England

来源：

JOURNAL OF MATERIALS SCIENCE | 2000年 / 35卷 / 11期

关键词：

D O I：

10.1023/A:1004790917616

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fracture surfaces including those through indentations on different nanocrystalline boride/nitride films were investigated by FE-SEM, conventional SEM, and AFM. TiB2, TiN, Ti(B,N), AlN, and (Ti,Al)N films have been obtained by non-reactive r.f. magnetron sputtering. Deformation was realized by cleavage fracture and under a Vickers indentor. Two types of film fracture connected with homogeneous and inhomogeneous deformation are described and discussed. The analogy between the inhomogeneous deformation films image and the river pattern in the case of conventional ceramics is also pointed out. (C) 2000 Kluwer Academic Publishers.

引用

页码：2799 / 2806

页数：8

共 22 条

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