Formation of Compositionally Abrupt Axial Heterojunctions in Silicon-Germanium Nanowires

被引:275
作者
Wen, C. -Y. [2 ,3 ]
Reuter, M. C. [1 ]
Bruley, J. [1 ]
Tersoff, J. [1 ]
Kodambaka, S. [4 ]
Stach, E. A. [2 ,3 ]
Ross, F. M. [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
[2] Purdue Univ, Sch Mat Engn, W Lafayette, IN 47907 USA
[3] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA
[4] Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA
基金
美国国家科学基金会;
关键词
SI/SIGE SUPERLATTICE NANOWIRES; HETEROSTRUCTURE NANOWIRES; GE NANOWIRES; GROWTH; SI; TEMPERATURE; CATALYST; SYSTEM;
D O I
10.1126/science.1178606
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
We have formed compositionally abrupt interfaces in silicon-germanium (Si-Ge) and Si-SiGe heterostructure nanowires by using solid aluminum-gold alloy catalyst particles rather than the conventional liquid semiconductor-metal eutectic droplets. We demonstrated single interfaces that are defect-free and close to atomically abrupt, as well as quantum dots (i.e., Ge layers tens of atomic planes thick) embedded within Si wires. Real-time imaging of growth kinetics reveals that a low solubility of Si and Ge in the solid particle accounts for the interfacial abruptness. Solid catalysts that can form functional group IV nanowire-based structures may yield an extended range of electronic applications.
引用
收藏
页码:1247 / 1250
页数:4
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