Nonclassical smoothening of nanoscale surface corrugations

被引:64
作者
Erlebacher, J [1 ]
Aziz, MJ
Chason, E
Sinclair, MB
Floro, JA
机构
[1] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA
[2] Brown Univ, Providence, RI 02912 USA
[3] Sandia Natl Labs, Albuquerque, NM 87185 USA
关键词
D O I
10.1103/PhysRevLett.84.5800
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We report the first experimental observation of nonclassical morphological equilibration of a corrugated crystalline surface. Periodic rippled structures with wavelengths of 290-550 nm were made on Si(001) by sputter rippling and then annealed at 650-750 degrees C. Tn contrast to the classical exponential decay with time, the ripple amplitude A(lambda)(t) followed an inverse linear decay, Al(t) = A(lambda)(0)/(1 + k(lambda)t), agreeing with a prediction of Ozdemir and Zangwill. We measure the activation energy for surface relaxation to be 1.6 +/- 0.2 eV, consistent with the fundamental energies of creation and migration on Si(001).
引用
收藏
页码:5800 / 5803
页数:4
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