Nonclassical smoothening of nanoscale surface corrugations

被引:64
作者
Erlebacher, J [1 ]
Aziz, MJ
Chason, E
Sinclair, MB
Floro, JA
机构
[1] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA
[2] Brown Univ, Providence, RI 02912 USA
[3] Sandia Natl Labs, Albuquerque, NM 87185 USA
关键词
D O I
10.1103/PhysRevLett.84.5800
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We report the first experimental observation of nonclassical morphological equilibration of a corrugated crystalline surface. Periodic rippled structures with wavelengths of 290-550 nm were made on Si(001) by sputter rippling and then annealed at 650-750 degrees C. Tn contrast to the classical exponential decay with time, the ripple amplitude A(lambda)(t) followed an inverse linear decay, Al(t) = A(lambda)(0)/(1 + k(lambda)t), agreeing with a prediction of Ozdemir and Zangwill. We measure the activation energy for surface relaxation to be 1.6 +/- 0.2 eV, consistent with the fundamental energies of creation and migration on Si(001).
引用
收藏
页码:5800 / 5803
页数:4
相关论文
共 32 条
[11]   Size scaling in the decay of metastable structures [J].
Fu, ES ;
Johnson, MD ;
Liu, DJ ;
Weeks, JD ;
Williams, ED .
PHYSICAL REVIEW LETTERS, 1996, 77 (06) :1091-1094
[12]   SELF-SIMILAR MORPHOLOGY AND DYNAMICS OF PERIODIC SURFACE PROFILES BELOW THE ROUGHENING TRANSITION [J].
HAGER, J ;
SPOHN, H .
SURFACE SCIENCE, 1995, 324 (2-3) :365-372
[13]  
Herring C., 1953, Structure and properties of solid surfaces, P5
[14]   SIMULATED HEALING OF CRYSTAL-SURFACES [J].
JIANG, Z ;
EBNER, C .
PHYSICAL REVIEW B, 1989, 40 (01) :316-323
[15]   Simulations of low-temperature annealing of crystal surfaces [J].
Jiang, Z ;
Ebner, C .
PHYSICAL REVIEW B, 1996, 53 (16) :11146-11151
[16]   SURFACE SELF-DIFFUSION ON SI FROM THE EVOLUTION OF PERIODIC ATOMIC STEP ARRAYS [J].
KEEFFE, ME ;
UMBACH, CC ;
BLAKELY, JM .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1994, 55 (10) :965-973
[17]   Diffusion of adsorbed Si dimers on Si(001) [J].
Krueger, M ;
Borovsky, B ;
Ganz, E .
SURFACE SCIENCE, 1997, 385 (01) :146-154
[18]   DYNAMICS OF A CRYSTAL-SURFACE BELOW ITS ROUGHENING TRANSITION [J].
LANCON, F ;
VILLAIN, J .
PHYSICAL REVIEW LETTERS, 1990, 64 (03) :293-296
[19]   SURFACE SELF-DIFFUSION AND SURFACE ENERGY OF NICKEL [J].
MAIYA, PS ;
BLAKELY, JM .
JOURNAL OF APPLIED PHYSICS, 1967, 38 (02) :698-+
[20]   FLATTENING OF A NEARLY PLANE SOLID SURFACE DUE TO CAPILLARITY [J].
MULLINS, WW .
JOURNAL OF APPLIED PHYSICS, 1959, 30 (01) :77-83