Photoluminescence studies of hydrogenated amorphous carbon and its alloys

被引:29
作者
Liu, S [1 ]
Gangopadhyay, S [1 ]
Sreenivas, G [1 ]
Ang, SS [1 ]
Naseem, HA [1 ]
机构
[1] UNIV ARKANSAS,DEPT ELECT ENGN,FAYETTEVILLE,AR 72701
关键词
D O I
10.1063/1.366185
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this article, we have studied the photoluminescence (PL) behaviors of a-C:H and its alloys (a-C:H,N,F). The samples were deposited in a radio frequency plasma enhanced chemical vapor deposition system with various mixtures of CH4, N-2, and NF3 gases. For this work, the effects of doping and excitation energy on PL peak position and bandwidth were investigated in detail. It was found that with the decrease in Tauc gap, the PL peak shifts to lower energy and the bandwidth is narrowed. If the excitation energy is below a certain energy, the PL peak shifts to lower energy and the bandwidth is reduced through a cutoff of the high energy region. If the excitation energy is above a certain energy, the PL becomes saturated and the shape remains almost the same. Our results support the cluster model proposed by Robertson that a-C:H contains both sp(2) and sp(3) sites, with sp(2) clusters embedded in a sp(3) bonded matrix. Our PL data are explained by the distribution function of cluster gaps. (C) 1997 American Institute of Physics. [S0021-8979(97)05521-7].
引用
收藏
页码:4508 / 4514
页数:7
相关论文
共 16 条
[1]   EFFECTS OF NITROGEN TRIFLUORIDE ON THE GROWTH AND PROPERTIES OF PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITED DIAMOND-LIKE CARBON-FILMS [J].
ANG, SS ;
SREENIVAS, G ;
BROWN, WD ;
NASEEM, HA ;
ULRICH, RK .
JOURNAL OF ELECTRONIC MATERIALS, 1993, 22 (04) :347-352
[2]   HIGH-ENERGY PHOTOLUMINESCENCE IN LOW TAUC GAP A-C-H-N [J].
DEMICHELIS, F ;
LIU, YC ;
RONG, XF ;
SCHREITER, S ;
TAGLIAFERRO, A .
SOLID STATE COMMUNICATIONS, 1995, 95 (07) :475-477
[3]   PHOTOLUMINESCENCE IN A-C-H FILMS [J].
DEMICHELIS, F ;
SCHREITER, S ;
TAGLIAFERRO, A .
PHYSICAL REVIEW B, 1995, 51 (04) :2143-2147
[4]   PHOTOLUMINESCENCE IN HYDROGENATED AMORPHOUS-SILICON [J].
DUNSTAN, DJ ;
BOULITROP, F .
PHYSICAL REVIEW B, 1984, 30 (10) :5945-5957
[5]   PHOTOLUMINESCENCE OF RF GLOW-DISCHARGE AMORPHOUS-CARBON FILMS [J].
FABISIAK, K ;
ROZPLOCH, F ;
SZATKOWSKI, J ;
TARGOWSKI, P .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1991, 126 (01) :275-280
[6]   STRUCTURAL AND OPTICAL-PROPERTIES OF AMORPHOUS-CARBON NITRIDE [J].
HAN, HX ;
FELDMAN, BJ .
SOLID STATE COMMUNICATIONS, 1988, 65 (09) :921-923
[7]   ELECTROLUMINESCENCE IN DIAMOND-LIKE CARBON-FILMS [J].
KIM, SB ;
WAGER, JF .
APPLIED PHYSICS LETTERS, 1988, 53 (19) :1880-1881
[8]   Infrared studies of hydrogenated amorphous carbon (a-C:H) and its alloys (n-C:H,N,F) [J].
Liu, S ;
Gangopadhyay, S ;
Sreenivas, G ;
Ang, SS ;
Naseem, HA .
PHYSICAL REVIEW B, 1997, 55 (19) :13020-13024
[9]   PHOTOLUMINESCENCE CHARACTERIZATION OF A-SI1-XCX - H ALLOYS PREPARED BY COSPUTTERING [J].
PALSULE, C ;
GANGOPADHYAY, S ;
CRONAUER, D ;
SCHRODER, B .
PHYSICAL REVIEW B, 1993, 48 (15) :10804-10814
[10]   ELECTRONIC AND ATOMIC-STRUCTURE OF AMORPHOUS-CARBON [J].
ROBERTSON, J ;
OREILLY, EP .
PHYSICAL REVIEW B, 1987, 35 (06) :2946-2957