Elastic modulus measurement of thin film using a dynamic method

A two layer composite model was developed using a beam vibration theory and the model was applied for measuring the Young's modulus of thin films. The Ti coated Si wafer composites were produced by radio frequency magnetron sputtering and used to test the developed model. The measured film modulus using a dynamic method was checked with that using the static method utilizing the pure bending of a cantilever composite beam. The film modulus values measured in both methods were in good agreement. The film modulus values for the specimens with different-film thicknesses were also in good agreement when they were measured by the same method.