Monte Carlo calculation of the energy distribution of backscattered electrons

The full energy distribution of backscattered electrons from elastic peak down to true secondary electron peak has been calculated by a Monte Carlo simulation method by including cascade secondary electrons production. The simulation model is based on the use of a dielectric function for describing electron inelastic scattering and secondary excitation, and the use of Mott cross section for electron elastic scattering. This calculation reproduces well the backscattering background observed in the direct mode of AES. The calculated absolute electron yields have been compared with the available experimental data. The simulation has indicated that, due to the effect of the elastic scattering differential cross section and detection solid angles, the shape of the energy distribution measured with a cylindrical mirror analyzer may differ from the overall energy spectrum of emitted electrons.