Room-temperature photoluminescence and electroluminescence from Er-doped silicon-rich silicon oxide

被引:48
作者
Tsybeskov, L
Duttagupta, SP
Hirschman, KD
Fauchet, PM
Moore, KL
Hall, DG
机构
[1] UNIV ROCHESTER,INST OPT,ROCHESTER,NY 14627
[2] ROCHESTER INST TECHNOL,DEPT MICROELECT ENGN,ROCHESTER,NY 14623
[3] UNIV ROCHESTER,DEPT PHYS & ASTRON,ROCHESTER,NY 14627
关键词
D O I
10.1063/1.118693
中图分类号
O59 [应用物理学];
学科分类号
摘要
Porous silicon was doped by Er ions using electroplating and was converted to silicon-rich silicon oxide (SRSO) by partial thermal oxidation at 900 degrees C. The room-temperature photoluminescence (PL) at similar to 1.5 mu m is intense and narrow (less than or equal to 15 meV) and decreases by less than 50% from 12 to 300 K. The PL spectrum reveals no luminescence bands related to Si-bandedge recombination, point defects, or dislocations and shows that the Er3+ centers are the most efficient radiative recombination centers. A light-emitting diode (LED) with an active layer made of Er-doped SRSO (SRSO:Er) was manufactured and room temperature electrluminescence at similar to 1.5 mu m was demonstrated. (C) 1997 American Institute of Physics.
引用
收藏
页码:1790 / 1792
页数:3
相关论文
共 17 条
[1]   LOCAL-STRUCTURE OF 1.54-MU-M-LUMINESCENCE ER-3+ IMPLANTED IN SI [J].
ADLER, DL ;
JACOBSON, DC ;
EAGLESHAM, DJ ;
MARCUS, MA ;
BENTON, JL ;
POATE, JM ;
CITRIN, PH .
APPLIED PHYSICS LETTERS, 1992, 61 (18) :2181-2183
[2]   ROOM-TEMPERATURE PHOTOLUMINESCENCE OF ERBIUM-DOPED HYDROGENATED AMORPHOUS-SILICON [J].
BRESLER, MS ;
GUSEV, OB ;
KUDOYAROVA, VK ;
KUZNETSOV, AN ;
PAK, PE ;
TERUKOV, EI ;
YASSIEVICH, IN ;
ZAKHARCHENYA, BP ;
FUHS, W ;
STURN, A .
APPLIED PHYSICS LETTERS, 1995, 67 (24) :3599-3601
[3]   SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS [J].
CANHAM, LT .
APPLIED PHYSICS LETTERS, 1990, 57 (10) :1046-1048
[4]   1.54-MU-M LUMINESCENCE OF ERBIUM-IMPLANTED III-V SEMICONDUCTORS AND SILICON [J].
ENNEN, H ;
SCHNEIDER, J ;
POMRENKE, G ;
AXMANN, A .
APPLIED PHYSICS LETTERS, 1983, 43 (10) :943-945
[5]   Photoluminescence and electroluminescence from porous silicon [J].
Fauchet, PM .
JOURNAL OF LUMINESCENCE, 1996, 70 :294-309
[6]  
FAUCHET PM, UNPUB
[7]   ROOM-TEMPERATURE ELECTROLUMINESCENCE FROM ER-DOPED CRYSTALLINE SI [J].
FRANZO, G ;
PRIOLO, F ;
COFFA, S ;
POLMAN, A ;
CARNERA, A .
APPLIED PHYSICS LETTERS, 1994, 64 (17) :2235-2237
[8]   Silicon-based visible light-emitting devices integrated into microelectronic circuits [J].
Hirschman, KD ;
Tsybeskov, L ;
Duttagupta, SP ;
Fauchet, PM .
NATURE, 1996, 384 (6607) :338-341
[9]   IMPACT EXCITATION OF THE ERBIUM-RELATED 1.54 MU-M LUMINESCENCE PEAK IN ERBIUM-DOPED INP [J].
ISSHIKI, H ;
KOBAYASHI, H ;
YUGO, S ;
KIMURA, T ;
IKOMA, T .
APPLIED PHYSICS LETTERS, 1991, 58 (05) :484-486
[10]   ELECTROCHEMICAL ER DOPING OF POROUS SILICON AND ITS ROOM-TEMPERATURE LUMINESCENCE AT SIMILAR-TO-1.54 MU-M [J].
KIMURA, T ;
YOKOI, A ;
HORIGUCHI, H ;
SAITO, R ;
IKOMA, T ;
SATO, A .
APPLIED PHYSICS LETTERS, 1994, 65 (08) :983-985