Multiple eigenmode analysis and density jumps in planar surface-wave plasmas with slot-antenna excitation

被引:45
作者
Ghanashev, I [1 ]
Sugai, H [1 ]
机构
[1] Nagoya Univ, Dept Elect Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
关键词
D O I
10.1063/1.874158
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Electromagnetic surface waves excitation in cold overdense uniform planar plasma is modeled and numerically analyzed. The microwave is injected through a slot antenna cut in the wall of the metal vessel and the forced electromagnetic oscillation localized in the slot is expanded in a series of eigenmodes, which propagate through a dielectric plate into the plasma. A general formulation for arbitrary plasma cross section and slot aperture geometry is given. It provides the basis for optimizing the slot-antenna design. The general approach is analytically applied to a large-area planar cylindrical plasma excited by an annular slot. Numerical results on the relative intensities of the individual eigenmodes and the overall field distribution at the plasma-dielectric interface for various electron densities are reported. The computed density dependence of the power reflection coefficient is shown to lead to density jumps and power-density hysteresis loops corresponding to the experimentally observed behavior. (C) 2000 American Institute of Physics. [S1070-664X(00)02007-3].
引用
收藏
页码:3051 / 3061
页数:11
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