Mode jumps and hysteresis in surface-wave sustained microwave discharges

被引：41

作者：

Ghanashev, I

Nagatsu, M

Xu, G

Sugai, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1997年 / 36卷 / 7B期

关键词：

electromagnetic waves; surface waves; microwave discharges; plasma processing; stability; mode jumps;

D O I：

10.1143/JJAP.36.4704

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Various electromagnetic surface modes along a finite area dielectric interface can sustain large area overdense plasmas. Mode jumps between these modes have been reported when changing the gas pressure. In this paper we report similar mode jumps caused by changing the wave power at fixed gas pressure. A simple theoretical analysis is proposed to explain this phenomenon on the basis of the resonance behavior of the chamber impedance and a stability criterion is formulated. The theory predicts a hysteresis in the power-density dependence, which was also observed experimentally.

引用

页码：4704 / 4710

页数：7

共 30 条

[1] SPATIAL INVESTIGATION OF A LARGE-DIAMETER MICROWAVE PLASMA [J].

BLUEM, E ;

BECHU, S ;

BOISSELAPORTE, C ;

LEPRINCE, P ;

MAREC, J .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (07) :1529-1533

[2]

FERREIRA CM, 1983, J PHYS D APPL PHYS, V16, P1673, DOI 10.1088/0022-3727/16/9/013

[3]

FERREIRA CM, 1985, SURFACE WAVES PLASMA, P113

[4] Surface wave eigenmodes in a finite-area plane microwave plasma [J].

Ghanashev, I ;

Nagatsu, M ;

Sugai, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (1A) :337-344

[5] METHOD FOR COMPUTING THE ATTENUATION COEFFICIENT OF ELECTROMAGNETIC-WAVES IN ANISOTROPIC-PLASMA COLUMNS [J].

GHANASHEV, I ;

ZHELYAZKOV, I .

PHYSICS OF PLASMAS, 1994, 1 (12) :3734-3741

[6] AXIAL ELECTRON-DENSITY AND WAVE POWER DISTRIBUTIONS ALONG A PLASMA-COLUMN SUSTAINED BY THE PROPAGATION OF A SURFACE MICROWAVE [J].

GLAUDE, VMM ;

MOISAN, M ;

PANTEL, R ;

LEPRINCE, P ;

MAREC, J .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (11) :5693-5698

[7] AXIAL DEPENDENCE OF THE ELECTRON-ENERGY DISTRIBUTION FUNCTION IN MICROWAVE DISCHARGES SUSTAINED BY PROPAGATING SURFACE-WAVES [J].

GROSSE, S ;

SCHLUTER, H ;

TATAROVA, E .

PHYSICA SCRIPTA, 1994, 50 (05) :532-539

[8]

KANDO M, 1996, J PLASMA FUSION RES, V72, P629

[9]

KOMACHI K, 1990, J MICROWAVE POWER EE, V25, P236

[10] AFFECTING FACTORS ON SURFACE-WAVE-PRODUCED PLASMA [J].

KOMACHI, K .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (01) :164-167

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