Instability dependent upon bias and temperature stress in amorphous-indium gallium zinc oxide (a-IGZO) thin-film transistors

被引:14
作者
Choi, Kwang-Il [1 ]
Nam, Dong-Ho [1 ]
Park, Jeong-Gyu [1 ]
Park, Sung-Su [1 ]
Choi, Won-Ho [1 ]
Han, In-Shik [1 ]
Jeong, Jae-Kyeong [2 ]
Lee, Hi-Deok [1 ]
Lee, Ga-Won [1 ]
机构
[1] Chungnam Natl Univ, Dept Elect Engn, Taejon 305764, South Korea
[2] Inha Univ, Dept Mat Sci & Engn, Inchon, South Korea
关键词
Oxide semiconductor; a-IGZO; instability mechanism;
D O I
10.1889/JSID18.1.108
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The effects of gate-bias stress, drain-bias stress, and temperature on the electrical parameters of amorphous-indium gallium zinc oxide (a-IGZO) thin-film transistors have been investigated. Results demonstrate that the devices suffer from threshold-voltage instabilities that are recovered at room temperature without any treatments. It is suggested that these instabilities result from the bias field and temperature-assisted charging and discharging phenomenon of preexisting traps at the near-interface and the a-IGZO channel region. The experimental results show that applying a drain-bias stress obviously impacts the instability of a-IGZO TFTs; however, the instability caused by drain bias is not caused by hot-electron generation as in conventional MOSFETs. And the degradation trend is affected by thermally activated carriers at high temperature.
引用
收藏
页码:108 / 112
页数:5
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