Synthesis Mechanisms of Organized Gold Nanoparticles: Influence of Annealing Temperature and Atmosphere

被引:133
作者
Bechelany, Mikhael [1 ]
Maeder, Xavier [1 ]
Riesterer, Jessica [1 ]
Hankache, Jihane [1 ]
Lerose, Damiana [2 ,3 ]
Christiansen, Silke [2 ,3 ]
Michler, Johann [1 ]
Philippe, Laetitia [1 ]
机构
[1] EMPA, Swiss Fed Labs Mat Testing & Res, Lab Mech Mat & Nanostruct, CH-3602 Thun, Switzerland
[2] Inst Photon Technol, D-07745 Jena, Germany
[3] Max Planck Inst Microstruct Phys, D-06120 Halle, Germany
关键词
NANOSPHERE LITHOGRAPHY; SILICON NANOWIRES; ORDERED ARRAYS; ELECTRON-BEAM; FABRICATION; GROWTH; DIFFUSION; ISLANDS;
D O I
10.1021/cg900981q
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We report on the synthesis of organized arrays of gold (Au) nanoparticles on thermally oxidized Si wafers using sputtering as a metal deposition method in combination with sphere lithography. This simple process leads to the formation of a honeycomb mask of Au at room temperature (RT). We study the transformation mechanism of this honeycomb mask to a hexagonal array of Au nanoparticles by annealing at different temperatures and in different atmospheres. The underlying mechanisms of pattern formation during annealing are coalescence of particles and Ostwald ripening and depend on temperature and atmosphere. The crystallinity and orientation of the nanoparticles with respect to the underlying substrate is analyzed by electron backscatter diffraction (EBSD), and the control of the morphology, size, shape, and orientation in different atmospheres (argon (Ar), nitrogen (N-2), air, hydrogen (H-2), and vacuum) is discussed.
引用
收藏
页码:587 / 596
页数:10
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