共 10 条
[1]
Microfluidic devices for μ-TAS applications fabricated by polymer hot embossing
[J].
MICROFLUIDIC DEVICES AND SYSTEMS,
1998, 3515
:177-182
[2]
GILLNER A, 2000, P INT SEM PREC ENG M, P105
[3]
Rapid fabrication of microcomponents
[J].
DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS, PROCEEDINGS,
2000, 4019
:436-443
[4]
HECKLE M, 1999, P HARMST 99, P84
[5]
LASSIGER B, 1995, KONTROLLIERTER FORMA
[6]
PULSED ULTRAVIOLET-LASER ABLATION
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
1993, 56 (01)
:51-63
[7]
Laser micromaching of mold inserts for replication techniques - State of the art and applications
[J].
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING VI,
2001, 4274
:331-345
[8]
PFLEGING W, 2000, MAT RES SOC S, V617
[9]
PFLEGING W, 1999, SURF ENG EUROMAT, V11, P455
[10]
Fabrication of micro-parts by high aspect ratio structuring and metal injection molding using the supercritical debinding method
[J].
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,
1998, 5 (02)
:90-92