Mechanical and optical properties of ITO films with anti-reflective and anti-wear coatings

被引：34

作者：

Wu, WF

Chiou, BS

机构：

[1] NATL CHIAO TUNG UNIV,DEPT ELECT ENGN,HSINCHU,TAIWAN

[2] NATL CHIAO TUNG UNIV,INST ELECT,HSINCHU,TAIWAN

来源：

APPLIED SURFACE SCIENCE | 1997年 / 115卷 / 01期

关键词：

D O I：

10.1016/S0169-4332(96)00852-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this study, radio frequency (rf) magnetron sputtered ITO films were coated with reactively sputtered SiO2 films. The microhardness, pull-off strength, scratch adhesion strength, optical transmittance and reflectance of the SiO1/ITO/substrate system are investigated. Coating of SiO2 enhances both the hardness and pull-off strength and reduces the scratch critical load of the system. The optical transmittance in the visible range is also improved with the addition of SiO2.

引用

收藏

页码：96 / 102

页数：7

相关论文

共 18 条

[1] GROUND RADIATION TESTS AND FLIGHT ATOMIC OXYGEN TESTS OF ITO PROTECTIVE COATINGS FOR GALILEO SPACECRAFT [J].

BOUQUET, FL ;

MAAG, CR .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1986, 33 (06) :1408-1412

[2] THE RELATIONSHIP BETWEEN HARDNESS AND SCRATCH ADHESION [J].

BURNETT, PJ ;

RICKERBY, DS .

THIN SOLID FILMS, 1987, 154 (1-2) :403-416

[3] RF MAGNETRON-SPUTTERED INDIUM TIN OXIDE FILM ON A REACTIVELY ION-ETCHED ACRYLIC SUBSTRATE [J].

CHIOU, BS ;

HSIEH, ST .

THIN SOLID FILMS, 1993, 229 (02) :146-155

[4] DEPOSITION OF INDIUM TIN OXIDE-FILMS ON ACRYLIC SUBSTRATES BY RADIOFREQUENCY MAGNETRON SPUTTERING [J].

CHIOU, BS ;

HSIEH, ST ;

WU, WF .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (07) :1740-1744

[5] ELECTRICAL BEHAVIOR OF LOW-POWER RF MAGNETRON-SPUTTERED INDIUM TIN OXIDE-FILMS ON SILICON SUBSTRATE [J].

CHIOU, BS ;

HSIEH, ST ;

WU, WF .

APPLIED SURFACE SCIENCE, 1994, 74 (04) :297-302

[6]

Chopra K.L., 1983, THIN FILM DEVICE APP

[7]

CHOPRA KL, 1981, THIN SOLID FILMS, V80, P143

[8] HIGH-QUALITY TRANSPARENT HEAT REFLECTORS OF REACTIVELY EVAPORATED INDIUM TIN OXIDE [J].

HAMBERG, I ;

HJORTSBERG, A ;

GRANQVIST, CG .

APPLIED PHYSICS LETTERS, 1982, 40 (05) :362-364

[9] MECHANICAL-PROPERTIES OF AND CRACKS AND WRINKLES IN VACUUM-DEPOSITED MGF2, CARBON AND BORON COATINGS [J].

KINBARA, A ;

BABA, S ;

MATUDA, N ;

TAKAMISAWA, K .

THIN SOLID FILMS, 1981, 84 (02) :205-212

[10] THIN METALLIC OXIDES AS TRANSPARENT CONDUCTORS [J].

MANIFACIER, JC .

THIN SOLID FILMS, 1982, 90 (03) :297-308