Effects of sub-gate bias on the operation of Schottky-barrier SOI MOSFETs having nano-scale channel

被引:6
作者
Lin, HC [1 ]
Wang, MF [1 ]
Hou, FJ [1 ]
Liu, JT [1 ]
Li, YM [1 ]
机构
[1] Natl Nano Device Labs, Hsinchu, Taiwan
来源
PROCEEDINGS OF THE 2002 2ND IEEE CONFERENCE ON NANOTECHNOLOGY | 2002年
关键词
D O I
10.1109/NANO.2002.1032226
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The characteristics of a novel nano-scale silicon-on-insulator (SOI) device featuring silicide Schottky source/drain and field-induced S/D extensions induced by a sub-gate were investigated. The new device exhibits unique and high-performance bi-channel operation capability. In this work, particular attention was paid to the effects of sub-gate bias on the device operation. It is shown that the applied sub-gate voltage not only increases the on-state current, but also effectively suppresses the off-state leakage. Extremely high on/off current ratio (> 10(9)) has thus been obtained. Dependences of sub-gate bias on sub-threshold swing and threshold-voltage roll-off characteristics were also explored.
引用
收藏
页码:205 / 208
页数:4
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