Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition

被引：250

作者：

Aarik, J ^{[1
]}

Aidla, A ^{[1
]}

Kiisler, AA ^{[1
]}

Uustare, T ^{[1
]}

Sammelselg, V ^{[1
]}

机构：

[1] ESTONIAN ACAD SCI,INST PHYS,EE-2400 TARTU,ESTONIA

来源：

THIN SOLID FILMS | 1997年 / 305卷 / 1-2期

关键词：

optical properties; structural properties; titanium oxide;

D O I：

10.1016/S0040-6090(97)00135-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The dependence of optical characteristics on the structure of atomic-layer-deposited titania (TiO2) thin films is studied. Amorphous films grown at 100 degrees C have an optical band gap of 3.3 eV while the refractive index values of these films range from 2.2 to 2.3 at a wavelength of 633 nm. The refractive index can be increased up to 2.65 by using the growth temperatures about 300 degrees C. Composition and structure studies reveal that the formation of preferentially oriented crystal (anatase) structure contributes to this increase of refractive index most significantly. (C) 1997 Elsevier Science S.A.

引用

页码：270 / 273

页数：4

共 16 条

[1] MORPHOLOGY AND STRUCTURE OF TIO2 THIN-FILMS GROWN BY ATOMIC LAYER DEPOSITION [J].