Effect of crystal structure on optical properties of TiO2 films grown by atomic layer deposition

被引:250
作者
Aarik, J [1 ]
Aidla, A [1 ]
Kiisler, AA [1 ]
Uustare, T [1 ]
Sammelselg, V [1 ]
机构
[1] ESTONIAN ACAD SCI,INST PHYS,EE-2400 TARTU,ESTONIA
关键词
optical properties; structural properties; titanium oxide;
D O I
10.1016/S0040-6090(97)00135-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The dependence of optical characteristics on the structure of atomic-layer-deposited titania (TiO2) thin films is studied. Amorphous films grown at 100 degrees C have an optical band gap of 3.3 eV while the refractive index values of these films range from 2.2 to 2.3 at a wavelength of 633 nm. The refractive index can be increased up to 2.65 by using the growth temperatures about 300 degrees C. Composition and structure studies reveal that the formation of preferentially oriented crystal (anatase) structure contributes to this increase of refractive index most significantly. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:270 / 273
页数:4
相关论文
共 16 条
[1]   MORPHOLOGY AND STRUCTURE OF TIO2 THIN-FILMS GROWN BY ATOMIC LAYER DEPOSITION [J].
AARIK, J ;
AIDLA, A ;
UUSTARE, T ;
SAMMELSELG, V .
JOURNAL OF CRYSTAL GROWTH, 1995, 148 (03) :268-275
[2]  
ALESKOVSKII VB, 1990, ACTA POLYTECH SCAND, V195, P155
[3]   OPTICAL PROPERTIES AND BAND STRUCTURE OF WURTZITE-TYPE CRYSTALS AND RUTILE [J].
CARDONA, M ;
HARBEKE, G .
PHYSICAL REVIEW, 1965, 137 (5A) :1467-+
[4]  
DORING H, 1992, BER BUNSEN PHYS CHEM, V96, P620
[5]   PHOTOELECTROCHEMICAL SPECTROSCOPY STUDIES OF TITANIUM-DIOXIDE SURFACES - THEORY AND EXPERIMENT [J].
HALLEY, JW ;
KOZLOWSKI, M ;
MICHALEWICZ, M ;
SMYRL, W ;
TIT, N .
SURFACE SCIENCE, 1991, 256 (03) :397-408
[6]   AN IR AND NMR-STUDY OF THE CHEMISORPTION OF TICL4 ON SILICA [J].
HAUKKA, S ;
LAKOMAA, EL ;
ROOT, A .
JOURNAL OF PHYSICAL CHEMISTRY, 1993, 97 (19) :5085-5094
[7]   FABRICATION OF TITANIUM-OXIDE THIN-FILMS BY CONTROLLED GROWTH WITH SEQUENTIAL SURFACE CHEMICAL-REACTIONS [J].
KUMAGAI, H ;
MATSUMOTO, M ;
TOYODA, K ;
OBARA, M ;
SUZUKI, M .
THIN SOLID FILMS, 1995, 263 (01) :47-53
[8]   ATOMIC LAYER GROWTH OF TIO2 ON SILICA [J].
LAKOMAA, EL ;
HAUKKA, S ;
SUNTOLA, T .
APPLIED SURFACE SCIENCE, 1992, 60-1 :742-748
[9]   Correlation between the density of TiO2 films and their properties [J].
Ottermann, CR ;
Bange, K .
THIN SOLID FILMS, 1996, 286 (1-2) :32-34
[10]   THE INFLUENCE OF THERMAL ANNEALING ON THE STRUCTURAL, ELECTRICAL AND OPTICAL-PROPERTIES OF TIO2-X THIN-FILMS [J].
RADECKA, M ;
ZAKRZEWSKA, K ;
CZTERNASTEK, H ;
STAPINSKI, T ;
DEBRUS, S .
APPLIED SURFACE SCIENCE, 1993, 65-6 :227-234