[1] Univ Maryland, MEMS Sensors & Actuators Lab, College Pk, MD 20742 USA
[2] Univ Maryland, Dept Mat Sci & Engn, College Pk, MD 20742 USA
[3] Univ Maryland, Syst Res Inst, College Pk, MD 20742 USA
[4] MIT, Dept Mech Engn, Cambridge, MA 02139 USA
[5] Univ Maryland, Dept Elect & Comp Engn, College Pk, MD 20742 USA
[6] Univ Maryland, Inst Biotechnol, Ctr Biosyst Res, College Pk, MD 20742 USA