A physics-based, dynamic thermal impedance model for SOI MOSFET's

被引:26
作者
Brodsky, JS
Fox, RM
Zweidinger, DT
Veeraraghavan, S
机构
[1] Department of Electrical and Computer Engineering, University of Florida, Gainesville
[2] Advanced Product Research and Development Laboratory, Motorola, Semiconductor Products Sector, Austin
关键词
D O I
10.1109/16.585551
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A physics-based compact analytical expression for the thermal impedance of SOI MOSFET's is presented, This new model extends the steady-state thermal model in [1] to allow for transient and ac analyses, while improving self-consistency for large devices. The modified steady-state model compares favorably to measurements, Using the software package Thermal Impedance Pre-Processor (TIPP), a multiple-pole circuit can be fitted to the thermal-impedance model, The new model is compared to three-dimensional (3-D) ANSYS(1) transient simulations with good results, The thermal-equivalent circuit is used in conjunction with a modified version of SOISPICE to give efficient electrothermal simulations in the de and transient regimes.
引用
收藏
页码:957 / 964
页数:8
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