Self-Catalyzed Epitaxial Growth of Vertical Indium Phosphide Nanowires on Silicon

被引:67
作者
Gao, Li [1 ]
Woo, Robyn L. [1 ]
Liang, Baolai [2 ]
Pozuelo, Marta [3 ]
Prikhodko, Sergey [3 ]
Jackson, Mike [3 ]
Goel, Niti [4 ]
Hudait, Mantu K. [5 ]
Huffaker, Diana L. [2 ]
Goorsky, Mark S. [3 ]
Kodambaka, Suneel [3 ]
Hicks, Robert F. [1 ,3 ]
机构
[1] Univ Calif Los Angeles, Dept Chem & Biomol Engn, Los Angeles, CA 90095 USA
[2] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA
[3] Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA
[4] Intel Corp, Santa Clara, CA 95052 USA
[5] Intel Corp, Hillsboro, OR 97124 USA
关键词
III-V NANOWIRES; ONE-DIMENSIONAL NANOSTRUCTURES; DEPENDENT PHOTOLUMINESCENCE; TWINNING SUPERLATTICES; INP NANOWIRES; QUANTUM DOTS; HETEROSTRUCTURES; ARRAYS; TEMPERATURE; GERMANIUM;
D O I
10.1021/nl803567v
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Vertical indium phosphide nanowires have been grown epitaxially on silicon (111) by metalorganic vapor-phase epitaxy. Liquid indium droplets were formed in situ and used to catalyze deposition. For growth at 350 degrees C, about 70% of the wires were vertical, while the remaining ones were distributed in the 3 other < 111 > directions. The vertical fraction, growth rate, and tapering of the wires increased with temperature and V/III ratio. At 370 degrees C and V/III equal to 200, 100% of the wires were vertical with a density of similar to 1.0 x 10(9) cm(-2) and average dimensions of 3.9 mu m in length, 45 nm in base width, and 15 nm in tip width. X-ray diffraction and transmission electron microscopy revealed that the wires were single-crystal zinc blende, although they contained a high density of rotational twins perpendicular to the < 111 > growth direction. The room temperature photoluminescence spectrum exhibited one peak centered at 912 +/- 10 nm with a FWHM of similar to 60 nm.
引用
收藏
页码:2223 / 2228
页数:6
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