Electrical and optical properties of pyrolytically electrostatic sprayed fluorine-doped tin-oxide: Dependence on substrate-temperature and substrate-nozzle distance

被引:28
作者
Zaouk, D
Zaatar, Y
Khoury, A
Llinares, C
Charles, JP [1 ]
Bechara, J
机构
[1] Supelec Univ Metz, CLOES, LICM, Metz, France
[2] Lebanese Univ, Fac Sci 2, LPSE, Dept Phys, Beirut, Lebanon
[3] Univ Montpellier 2, Ctr Elect & Microoptoelect Montpellier, F-34095 Montpellier 5, France
关键词
D O I
10.1063/1.373020
中图分类号
O59 [应用物理学];
学科分类号
摘要
Tin-oxide (SnO2) thin films were prepared by a modified spray technique called electrostatic spray pyrolysis. Their electrical and optical properties dependence on fluorine concentration, substrate temperature T-s, and the substrate-nozzle distance D-sn was studied. D-sn and T-s seem to be interrelated for the optimization of good quality fluorine-doped SnO2 films. Films of about 9x10(-4) Omega cm resistivity and high visible 85% transparency were obtained for a substrate temperature of 550 degrees C, a 6 cm substrate nozzle distance, and 80% of hydrofluorhydric acid HF in the starting solution. These data are discussed in light of the kinetics reaction. (C) 2000 American Institute of Physics. [S0021-8979(00)05610-3].
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页码:7539 / 7543
页数:5
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