Preparation of Pb(Ti,Zr)O-3/RuO2 multilayers in situ by pulsed laser ablation deposition

被引：3

作者：

Iembo, A

Fuso, F

Allegrini, M

Arimondo, E

Debenedittis, A

DiCristoforo, A

Mengucci, P

Watts, BE

Leccabue, F

机构：

[1] UNIV ANCONA,INFM,I-60131 ANCONA,ITALY

[2] CNR,INST MASPEC,I-43100 PARMA,ITALY

来源：

INTEGRATED FERROELECTRICS | 1997年 / 18卷 / 1-4期

关键词：

ruthenium oxide; lead zirconate titanate; pulsed laser deposition;

D O I：

10.1080/10584589708221716

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

RuO2/PbZr0.52Ti0.48O3 multilayers have been prepared by pulsed laser deposition and characterised by Grazing Incident Angle Bragg Diffraction and scanning electron microscopy. The results are correlated with the different deposition conditions and post-growth thermal annealing. The structure of the paraelectric pyrochlore phase (Pb-2(Zr,Ti)(2)O-6) and its stability relative to the ferroelectric perovskite is discussed.

引用

页码：397 / 404

页数：8

共 7 条

[1] CONTRIBUTION OF ELECTRODES AND MICROSTRUCTURES TO THE ELECTRICAL-PROPERTIES OF PB(ZR0.53TI0.47)O-3 THIN-FILM CAPACITORS [J].