Diffusion and dissociation of neutral divacancies in crystalline silicon

被引:40
作者
Hwang, GS [1 ]
Goddard, WA [1 ]
机构
[1] CALTECH, Beckman Inst, Mat & Proc Simulat Ctr, Pasadena, CA 91125 USA
来源
PHYSICAL REVIEW B | 2002年 / 65卷 / 23期
关键词
D O I
10.1103/PhysRevB.65.233205
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Based on ab initio calculations with a 216-atom supercell, we find mechanisms for the diffusion and dissociation of the neutral-state divacancy (V-2(0)). Contrary to the popular belief that diffusion is via successive detachment and recombination (a two-step process), we find that V-2(0) diffusion follows predominantly a one-step hopping mechanism; that is, two adjacent vacancies move together. The calculated activation energy of 1.35 eV is in excellent agreement with experiment (approximate to1.3 eV). This work suggests that to dissociate the V-V pair the neighboring Si atoms on each side of the V-2(0) must move inward simultaneously to form the stable V-Si-Si-V configuration, and then a third neighboring Si atom hops inward to leads to the V-Si-Si-Si-V state whose energy is almost equivalent to that of two separated monovacancies (2V(1)(0)) of 6.96 eV. We also present the formation energy of the vacancy-vacancy complex for different relative positions, providing insight into the vacancy-vacancy interaction.
引用
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页码:1 / 3
页数:3
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