Optimizing the Release of ALD Grown ZnO Nanotubes from Anodic Aluminum Oxide Templates

被引:3
作者
Abdel-Fattah, Tarek M. [1 ]
Gu, Diefeng [2 ]
Baumgart, Helmut [2 ]
Namkoong, G. [2 ]
机构
[1] Christopher Newport Univ, Newport News, VA 23606 USA
[2] Old Dominion Univ, Dept Elect Engn, Norfolk, VA 23529 USA
来源
ATOMIC LAYER DEPOSITION APPLICATIONS 5 | 2009年 / 25卷 / 04期
关键词
ATOMIC LAYER DEPOSITION;
D O I
10.1149/1.3205066
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Zinc oxide nanotubes were synthesized using atomic layered deposition (ALD) technique within anodic aluminum oxide (AAO) as a template and followed by removal of AAO using 0.4% NaOH solution for release of the nanotubes. Scanning electron microscopy (SEM) revealed preferential etching along grain boundaries of the resultant exposed ZnO nanotubes surface. Thermodynamic modeling diagrams were generated to optimize release of ZnO nanotubes from AAO.
引用
收藏
页码:315 / 320
页数:6
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