Composition Control of Electron Beam Induced Nanodeposits by Surface Pretreatment and Beam Focusing

Cross-sectional transmission electron microscopy with elemental analysis was used to investigate shape and composition of nanostructures fabricated by electron beam induced deposition. The nanostructures were deposited oil a thin edge of the silicon membrane allowing characterization without intermediate distorting preparation steps, such as focused ion beam milling. The effect of the surface carbon contaminants and the electron beam focusing oil nanostructure composition was Studied. It is shown how carbon content of nanostructures can be reduced by sample preheating, forming metal nanostructures with higher purity advantageous for circuitry and lithography applications.