Compositional separation in CoCrTa perpendicular magnetic thin films

被引:9
作者
Kimoto, K [1 ]
Hirayama, Y [1 ]
Futamoto, M [1 ]
机构
[1] HITACHI LTD, CENT RES LAB, KOKUBUNJI, TOKYO 185, JAPAN
关键词
CoCr alloy; compositional separation; electron energy loss spectroscopy; energy filter; imaging filter; transmission electron microscopy;
D O I
10.1016/0304-8853(96)00053-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Compositional separations in CoCrTa perpendicular magnetic thin films deposited at different substrate temperatures are observed using a transmission electron microscope equipped with an imaging Filter. Quantitative elemental maps of cobalt and chromium are constructed for specimens deposited at substrate temperatures of 25, 170 and 230 degrees C. Both intragrain and intergrain chromium segregation are observed at elevated substrate temperatures. High coercive force is obtained for specimens with extensive chromium segregation at the grain boundaries.
引用
收藏
页码:401 / 405
页数:5
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