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Free-standing Si/SiGe micro- and nano-objects

被引：37
作者：
Zhang, L
Golod, SV
Deckardt, E
Prinz, V
Grützmacher, D
机构：
[1] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland
[2] Inst Semicond Phys, Novosibirsk 630090, Russia
来源：
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES | 2004年 / 23卷 / 3-4期
关键词：
nanotubes; Si; SiGe; ultra-high vacuum chemical vapor deposition;
D O I：
10.1016/j.physe.2003.12.131
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Free-standing SiGe/Si microtubes, microneedles, helical coils, bridges and submicron vertical rings have been fabricated from elastically strained SiGe/Si heterostructures grown by ultra-high vacuum chemical vapor deposition. Three-dimensional micro- and nano-objects have been formed by self-scrolling after electron beam lithography, reactive ion etching and wet selective etching. Vertical rings with very smooth sidewalls may have applications in hot embossing lithography as well as in microelectronics and micromechanics. By adjusting the SiGe/Si bilayer thickness or Ge concentration, the diameter of tube or ring could be decreased into the nanometer scale. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：280 / 284
页数：5
相关论文
共 14 条
[1]  
Deneke C, 2002, MATER RES SOC SYMP P, V728, P141
[2]   Freestanding SiGe/Si/Cr and SiGe/Si/SixNy/Cr microtubes [J].
Golod, SV ;
Prinz, VY ;
Wägli, P ;
Zhang, L ;
Kirfel, O ;
Deckhardt, E ;
Glaus, F ;
David, C ;
Grützmacher, D .
APPLIED PHYSICS LETTERS, 2004, 84 (17) :3391-3393
[3]   Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils [J].
Golod, SV ;
Prinz, VY ;
Mashanov, VI ;
Gutakovsky, AK .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2001, 16 (03) :181-185
[4]   Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays [J].
Prinz, VY ;
Seleznev, VA ;
Gutakovsky, AK ;
Chehovskiy, AV ;
Preobrazhenskii, VV ;
Putyato, MA ;
Gavrilova, TA .
PHYSICA E, 2000, 6 (1-4) :828-831
[5]   A new technique for fabricating three-dimensional micro- and nanostructures of various shapes [J].
Prinz, VY ;
Grützmacher, D ;
Beyer, A ;
David, C ;
Ketterer, B ;
Deckardt, E .
NANOTECHNOLOGY, 2001, 12 (04) :399-402
[6]   Self-assembled nanoholes, lateral quantum-dot molecules, and rolled-up nanotubes [J].
Schmidt, OG ;
Deneke, C ;
Kiravittaya, S ;
Songmuang, R ;
Heidemeyer, H ;
Nakamura, Y ;
Zapf-Gottwick, R ;
Müller, C ;
Jin-Phillipp, NY .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (05) :1025-1034
[7]   Semiconductor tubes, rods and rings of nanometer and micrometer dimension [J].
Schmidt, OG ;
Deneke, C ;
Manz, YM ;
Müller, C .
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2002, 13 (2-4) :969-973
[8]   Free-standing semiconductor micro- and nano-objects [J].
Schmidt, OG ;
Deneke, C ;
Schmarje, N ;
Müller, C ;
Jin-Phillipp, NY .
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2002, 19 (1-2) :393-396
[9]  
Schmidt OG, 2001, ADV MATER, V13, P756, DOI 10.1002/1521-4095(200105)13:10<756::AID-ADMA756>3.0.CO
[10]  
2-F
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