A prealigned process of integrating optical waveguides with microfluidic devices

被引：38

作者：

Lien, V ^{[1
]}

Berdichevsky, Y ^{[1
]}

Lo, YH ^{[1
]}

机构：

[1] Univ Calif San Diego, Dept Elect & Comp Engn, La Jolla, CA 92093 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2004年 / 16卷 / 06期

关键词：

biosensors; fabrication; integrated optics; optical waveguides;

D O I：

10.1109/LPT.2004.826774

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a novel technology to monolithically integrate buried heterostructure waveguides with microfluidic channels in a prealigned manner. The fabrication process produced sealed microfluidic channels, low-loss waveguides, and excellent waveguide-channel alignment. The resultant device allows efficient optical coupling between the channels and the waveguides. Thus, the waveguides can both deliver the optical power and collect the remitted light.

引用

页码：1525 / 1527

页数：3

共 15 条

[1]

BERDICHEVSKY Y, UNPUN SENS ACTUATO B, V97, P402

[2] Activation and Sorting of Human White Blood Cells [J].

Carlson, Robert H. ;

Gabel, Chris ;

Chan, Shirley ;

Austin, Robert H. .

BIOMEDICAL MICRODEVICES, 1998, 1 (01) :39-47

[3] An integrated fluorescence detection system in poly(dimethylsiloxane) for microfluidic applications [J].

Chabinyc, ML ;

Chiu, DT ;

McDonald, JC ;

Stroock, AD ;

Christian, JF ;

Karger, AM ;

Whitesides, GM .

ANALYTICAL CHEMISTRY, 2001, 73 (18) :4491-4498

[4] Photonic circuits integrated with CMOS compatible photodetectors [J].

Cristea, D ;

Craciunoiu, F ;

Modreanu, M ;

Caldararu, M ;

Cernica, I .

OPTICAL MATERIALS, 2001, 17 (1-2) :201-205

[5] Optical particle detection integrated in a dielectrophoretic lab-on-a-chip [J].

Cui, L ;

Zhang, T ;

Morgan, H .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2002, 12 (01) :7-12

[6] Monolithic integration of microfluidic channels and optical waveguides in silica on silicon [J].

Friis, P ;

Hoppe, K ;

Leistiko, O ;

Mogensen, KB ;

Hübner, J ;

Kutter, JP .

APPLIED OPTICS, 2001, 40 (34) :6246-6251

[7] A microfabricated fluorescence-activated cell sorter [J].

Fu, AY ;

Spence, C ;

Scherer, A ;

Arnold, FH ;

Quake, SR .

NATURE BIOTECHNOLOGY, 1999, 17 (11) :1109-1111

[8] Development of a microfluidic device for fluorescence activated cell sorting [J].

Krüger, J ;

Singh, K ;

O'Neill, A ;

Jackson, C ;

Morrison, A ;

O'Brien, P .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2002, 12 (04) :486-494

[9] Integrated bio/chemical microsystems employing optical detection: the clip-on [J].

Leistiko, O ;

Jensen, PF .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1998, 8 (02) :148-150

[10] Transport, manipulation, and reaction of biological cells on-chip using electrokinetic effects [J].

Li, PCH ;

Harrison, DJ .

ANALYTICAL CHEMISTRY, 1997, 69 (08) :1564-1568

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