A sputtered thin film of nanostructured Ni/Pt/Ti on Al2O3 substrate for ethanol sensing

被引：52

作者：

Weng, YC ^{[1
]}

Rick, JF ^{[1
]}

Chou, TC ^{[1
]}

机构：

[1] Natl Cheng Kung Univ, Dept Chem Engn, Tainan 701, Taiwan

来源：

BIOSENSORS & BIOELECTRONICS | 2004年 / 20卷 / 01期

关键词：

ethanol; sensor; sputtered Ni/Pt/Ti/Al2O3; amperometry; selectivity; reproducibility;

D O I：

10.1016/j.bios.2004.01.027

中图分类号：

Q6 [生物物理学];

学科分类号：

071011 ;

摘要：

A novel thin film ethanol sensor using sputtered Ni/Pt/Ti on an Al2O3 substrate as the working electrode in an alkaline solution was developed. Atomic force microscopy (AFM) and scanning electron microscopy (SEM) were used to characterize the nanostructure of nickel films. Sputtering deposition conditions for maximum catalytic efficiency, electrode selectivity, and reproducibility were discussed. The results showed that ethanol oxidation was more efficient on the sputtered Ni/Pt/Ti on an Al2O3 substrate electrode than that on the conventional nickel electrode. The optimal operating conditions to generate the sputtered Ni/Pt/Ti on the Al2O3 substrate electrode were: 45 min of Ni sputtering deposition time, and 50 W of Ni sputtering power. The results also indicated that the response time of the prepared ethanol sensor is 27 s and the best sensitivity is 3.08 muA muM(-1) cm(-2). (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：41 / 51

页数：11

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