Crystallization kinetics of amorphous silicon carbide derived from polymeric precursors

被引:18
作者
Kurtenbach, D
Mitchell, BS
Zhang, HY
Ade, M
Müller, E
机构
[1] Univ Min & Technol Freiberg, Inst Ceram Mat, D-09596 Freiberg, Germany
[2] Tulane Univ, Dept Chem Engn, New Orleans, LA 70118 USA
关键词
nucleation; crystallization; degradation; amorphous SiC; crystal size control;
D O I
10.1016/S0040-6031(99)00230-0
中图分类号
O414.1 [热力学];
学科分类号
摘要
Phase separation processes like nucleation, crystallization and degradation of a polymer-derived amorphous silicon carbide precursor were quantified by means of thermoanalytical methods (DTA/TG). It is shown that the crystal size of the nanostructure could be controlled and limited by nuclei-inducing heat treatments. Furthermore, the justification for application of the JMAK theory was partially given. A comparison to amorphous SiC processed by other means (ion implanted) was drawn and reveals surprising similarities. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:155 / 161
页数:7
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