Rough ZnO layers by LP-CVD process and their effect in improving performances of amorphous and microcrystalline silicon solar cells

被引:192
作者
Fay, S. [1 ]
Feitknecht, L. [1 ]
Schluchter, R. [1 ]
Kroll, U. [1 ]
Vallat-Sauvain, E. [1 ]
Shah, A. [1 ]
机构
[1] Univ Neuchatel, Inst Microtech, CH-2000 Neuchatel, Switzerland
关键词
TCO; LP-CVD; zinc oxide; thin-film silicon solar cells; light-scattering capacity;
D O I
10.1016/j.solmat.2006.06.003
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
Doped ZnO layers deposited by low-pressure chemical vapour deposition technique have been studied for their use as transparent contact layers for thin-film silicon solar cells. Surface roughness of these ZnO layers is related to their light-scattering capability; this is shown to be of prime importance to enhance the current generation in thin-film silicon solar cells. Surface roughness has been tuned over a large range of values, by varying thickness and/or doping concentration of the ZnO layers. A method is proposed to optimize the light-scattering capacity of ZnO layers, and the incorporation of these layers as front transparent conductive oxides for p-i-n thin-film microcrystalline silicon solar cells is studied. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:2960 / 2967
页数:8
相关论文
共 10 条
[1]   TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].
CHOPRA, KL ;
MAJOR, S ;
PANDYA, DK .
THIN SOLID FILMS, 1983, 102 (01) :1-46
[2]  
FAY S, 2000, P 16 EUR PHOT SOL EN, V1, P361
[3]  
Keppner H., 1995, SOLID STATE PHENOM, V44-46, P97
[4]   Fast deposition of a-Si:H layers and solar cells in a large-area (40x40cm2) VHF-GD reactor [J].
Kroll, U ;
Fischer, D ;
Meier, J ;
Sansonnens, L ;
Howling, A ;
Shah, A .
AMORPHOUS AND HETEROGENEOUS SILICON THIN FILMS: FUNDAMENTALS TO DEVICES-1999, 1999, 557 :121-126
[5]  
Meier J, 2003, WORL CON PHOTOVOLT E, P2801
[6]   Enhanced light-trapping for micromorph tandem solar cells by LP-CVD ZnO [J].
Meier, J ;
Spitznagel, J ;
Fay, S ;
Bucher, C ;
Graf, U ;
Kroll, U ;
Dubail, S ;
Shah, A .
CONFERENCE RECORD OF THE TWENTY-NINTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE 2002, 2002, :1118-1121
[7]   Efficiency enhancement of amorphous silicon p-i-n solar cells by LP-CVD ZnO [J].
Meier, J ;
Kroll, U ;
Dubail, S ;
Golay, S ;
Fay, S ;
Dubail, J ;
Shah, A .
CONFERENCE RECORD OF THE TWENTY-EIGHTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 2000, 2000, :746-749
[8]   On the way towards high efficiency thin film silicon solar cells by the ''micromorph'' concept [J].
Meier, J ;
Torres, P ;
Platz, R ;
Dubail, S ;
Kroll, U ;
Selvan, JAA ;
Vaucher, NP ;
Hof, C ;
Fischer, D ;
Keppner, H ;
Shah, A ;
Ufert, KD ;
Giannoules, P ;
Koehler, J .
AMORPHOUS SILICON TECHNOLOGY - 1996, 1996, 420 :3-14
[9]   PROPERTIES OF ZINC-OXIDE FILMS PREPARED BY THE OXIDATION OF DIETHYL ZINC [J].
ROTH, AP ;
WILLIAMS, DF .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) :6685-6692
[10]   TEXTURED ZNO THIN-FILMS FOR SOLAR-CELLS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].
WENAS, WW ;
YAMADA, A ;
KONAGAI, M ;
TAKAHASHI, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1991, 30 (3B) :L441-L443