Fundamental aspects and applications of electrochemical microfabrication

被引：269

作者：

Datta, M ^{[1
]}

Landolt, D ^{[1
]}

机构：

[1] Swiss Fed Inst Technol, Lab Met Chim, Dept Mat, MX C Ecublens,EPFL, CH-1015 Lausanne, Switzerland

来源：

ELECTROCHIMICA ACTA | 2000年 / 45卷 / 15-16期

关键词：

electrochemical microfabrication; electrodeposition; electrochemical micromachining; electronics industry; current distribution;

D O I：

10.1016/S0013-4686(00)00350-9

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The theory and applications of electrochemical microfabrication technology are reviewed focusing on electrodeposition and dissolution processes. Electrochemical microfabrication offers some unique advantages over competing vapor phase technologies and therefore finds increasing use in the electronics and microsystems industries. The present paper discusses the underlying principles of electrochemical microfabrication processes. The important role of mass transport and current distribution is stressed and it is shown how numerical modeling contributes to the present understanding of critical process parameters. The application of electrochemical microfabrication technology in the electronics industry is illustrated with selected examples. (C) 2000 Elsevier Science Ltd. All rights reserved.

引用

页码：2535 / 2558

页数：24

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