Enhanced performance of HFCVD nanocrystalline diamond self-mated tribosystems by plasma pretreatments on silicon nitride substrates

被引:31
作者
Abreu, C. S.
Amaral, M.
Oliveira, F. J.
Fernandes, A. J. S.
Gomes, J. R.
Silva, R. F. [1 ]
机构
[1] Univ Aveiro, CICECO, Ceram & Glass Engn Dept, P-3810193 Aveiro, Portugal
[2] ISEP, Porto Super Engn Inst, Dept Phys, P-4200072 Oporto, Portugal
[3] Univ Aveiro, Dept Phys, P-3810193 Aveiro, Portugal
[4] Univ Minho, CIICS, Dept Mech Engn, P-4800058 Guimaraes, Portugal
关键词
nanocrystalline; diamond film; hot filament CVD; tribology;
D O I
10.1016/j.diamond.2006.07.025
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Nanocrystalline diamond (NCD) coatings were grown by the hot-filament chemical vapour deposition (HFCVD) method on hydrogen plasma pretreated silicon nitride (Si3N4) substrates. The friction and wear behaviour of self-mated NCD films, submitted to unlubricated sliding and high applied loads (up to 90 N), was assessed using an oscillating ball-on-flat configuration in ambient atmosphere. The reciprocating tests revealed an initially high friction coefficient peak, associated to the starting surface roughness of NCD coatings (R-q = 50 nm). Subsequently, a steady-state regime with low friction coefficient values (0.01-0.04) sets in, related to a smoother (R-q = 17 nm) tribologically modified surface. A polishing wear mechanism governing the material loss was responsible for mild wear coefficients (k similar to 10(-7) mm(3) N-1 m(-1)). The hydrogen etching procedure notably increased the film adhesion with respect to untreated surfaces as demonstrated by the high threshold loads (60 N; 3.5 GPa) prior to film delamination. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:2024 / 2028
页数:5
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