Microwave properties of compositionally graded (Ba, Sr)TiO3 thin films for electrically tunabel microwave devices

被引：12

作者：

Lee, SJ ^{[1
]}

Moon, SE ^{[1
]}

Kwak, MH ^{[1
]}

Ryu, HC ^{[1
]}

Kim, YT ^{[1
]}

Han, SK ^{[1
]}

机构：

[1] Elect & Telecommun Res Inst, Basic Res Lab, Taejon 305350, South Korea

来源：

INTEGRATED FERROELECTRICS | 2002年 / 49卷

关键词：

compositionally graded BST films; phase shifter; microwave properties; s-parameter; coplanar waveguide;

D O I：

10.1080/10584580290171865

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Compositionally graded ferroelectric thin films have execellent dielectric properties and abnormal ferroelectric properties which can be used in various microelectronic devices. Compositionally graded (BaSr)TiO3[BST] thin films were prepared on MgO substrates by pulsed laser deposition. The crystalline orientation and microstructure of graded BST thin films were studied using x-ray diffraction, scanning electron microscopy. The microwave properties of the graded BST films were investigated as a function of the direction of composition gradient with respect to substrate. Also, we report on the fabrication and performance of coplanar ferroelectric phase shifters. Coplanar waveguide(CPW) type phase shifters have been fabricated on the graded BST/MgO using Au/Cr metal electrodes. The phase shifters were tested at frequencies up to 20 GHz.

引用

页码：151 / 158

页数：8

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