Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films

被引：91

作者：

Muralt, P ^{[1
]}

Baborowski, J ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland

来源：

JOURNAL OF ELECTROCERAMICS | 2004年 / 12卷 / 1-2期

关键词：

piezoelectric thin films; microsystems; acoustic sensors;

D O I：

10.1023/B:JECR.0000034004.99355.8b

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A review is given on the current state of the art in piezoelectric micromachined ultrasonic transducers (pMUT). It is attempted to quantify the limits of pMUT's with respect to the electromechanical coupling, and to relate current achievements. Main needs for future research are identified in design, micromachining and further improvements of PZT films. Applications are shortly reviewed.

引用

页码：101 / 108

页数：8

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