Dependence of generation and structures of stacking faults on growing surface stoichiometries in ZnSe/GaAs

被引:40
作者
Kuo, LH
Kimura, K
Miwa, S
Yasuda, T
Yao, T
机构
[1] ANGSTROM TECHNOL PARTNERSHIP,TSUKUBA,IBARAKI 305,JAPAN
[2] NAIR,TSUKUBA,IBARAKI 305,JAPAN
[3] TOHOKU UNIV,INST MAT RES,SENDAI,MIYAGI 980,JAPAN
关键词
D O I
10.1063/1.117597
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin ZnSe films were grown by molecular beam epitaxy on Zn exposed (2x4) As-stabilized surfaces of GaAs epilayers under varied beam Bur ratios. A very low density of faulted defects in the range of similar to 10(4)/cm(2) was generated in samples grown under a condition with a mixture of both (2x1) and weak c(2x2) surface reconstructions at the initial stages of growth. However, an asymmetric distribution on the densities of extrinsic cation- and anion-terminated Shockley-type stacking faults were generated, respectively, in samples grown under Zn- and Se-rich surface stoichiometries. (C) 1996 American Institute of Physics.
引用
收藏
页码:1408 / 1410
页数:3
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