Local etching of insulator-coated carbon nanotubes towards passivated nanoprobes

被引：8

作者：

Ikuno, T

Katayama, M

Lee, KY

Kuzuoka, T

Lee, JG

Honda, S

Mori, H

Oura, K

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Elect Engn, Suita, Osaka 5650871, Japan

[2] Osaka Univ, Res Ctr Ultrahigh Voltage Electron Microscopy, Ibaraki, Osaka 5670047, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2004年 / 43卷 / 7B期

关键词：

carbon nanotube; insulator-carbon nanotube composite; passivation; nanoprobe; reactive ion etching; photoresist;

D O I：

10.1143/JJAP.43.L987

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a method for local etching of the tip region of insulator-coated carbon nanotubes (CNTs) towards passivated nanoprobes. By reactive ion etching (RIE), a 20-nm-thick SiO2 layer, which was uniformly wrapped around vertically oriented CNTs, was selectively removed from the tip, maintaining the crystallinity of inner CNT. It was found that the length of exposed CNT is controlled via etching time at an etching rate of 16 nm/min. This local etching was achieved by RIE using CF4 as an etchant, and photoresist as a passivation mask.

引用

页码：L987 / L989

页数：3

共 9 条

[1] Dresselhaus MS, 2001, CARBON NANOTUBES SYN
[2] Individually addressable vertically aligned carbon nanofiber-based electrochemical probes
Guillorn, MA
McKnight, TE
Melechko, A
Merkulov, VI
Britt, PF
Austin, DW
Lowndes, DH
Simpson, ML
[J]. JOURNAL OF APPLIED PHYSICS, 2002, 91 (06) : 3824 - 3828
[3] HELICAL MICROTUBULES OF GRAPHITIC CARBON
IIJIMA, S
[J]. NATURE, 1991, 354 (6348) : 56 - 58
[4] Metal-coated carbon nanotube tip for scanning tunneling microscope
Ikuno, T
Katayama, M
Kishida, M
Kamada, K
Murata, Y
Yasuda, T
Honda, S
Lee, JG
Mori, H
Oura, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2004, 43 (5A): : L644 - L646
[5] Insulator-coated carbon nanotubes synthesized by pulsed laser deposition
Ikuno, T
Katayama, M
Kamada, K
Honda, S
Lee, JG
Mori, H
Oura, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2003, 42 (11B): : L1356 - L1358
[6] Method for aligned bamboolike carbon nanotube growth using RF magnetron sputtering
Lee, KY
Honda, S
Ikuno, T
Fujimoto, K
Tsuji, K
Ohkura, S
Katayama, M
Hirao, T
Oura, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (2A): : 713 - 715
[7] Synthesis of aligned bamboo-like carbon nanotubes using radio frequency magnetron sputtering
Lee, KY
Ikuno, T
Tsuji, K
Ohkura, S
Honda, S
Katayama, M
Oura, K
Hirao, T
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (04): : 1437 - 1441
[8] Nanoelectrode arrays based on low site density aligned carbon nanotubes
Tu, Y
Lin, YH
Ren, ZF
[J]. NANO LETTERS, 2003, 3 (01) : 107 - 109
[9] SIGNAL-TO-NOISE RATIO IN MICROELECTRODE-ARRAY-BASED ELECTROCHEMICAL DETECTORS
WEBER, SG
[J]. ANALYTICAL CHEMISTRY, 1989, 61 (04) : 295 - 302

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