Single and multiple ultrashort laser pulse ablation threshold of Al2O3 (corundum) at different etch phases

被引：53

作者：

Ashkenasi, D ^{[1
]}

Stoian, R ^{[1
]}

Rosenfeld, A ^{[1
]}

机构：

[1] Max Born Inst Nichlineare Opt & Kurzzeitspektrosk, D-12489 Berlin, Germany

来源：

APPLIED SURFACE SCIENCE | 2000年 / 154卷

关键词：

ultrashort laser pulses; surface damage threshold; incubation; corundum;

D O I：

10.1016/S0169-4332(99)00433-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We present surface ablation threshold investigations on Al2O3 (corundum) after single- and multiple-laser pulse irradiation at 800 nm in the picosecond and subpicosecond duration range. Scattered light monitoring was utilized for in situ damage detection and irradiated spots were inspected by optical and electron microscopy. We obtained fluence thresholds for two distinctively different etch phases. The threshold for ablation drops sharply for multiple-laser shot irradiation, due to material-dependent incubation effects. The threshold reduction for increased number of laser shots is related to defect accumulation. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：40 / 46

页数：7

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