Micro-Raman spectroscopy of the solid state: applications to semiconductors and thin films

被引:30
作者
Jawhari, T [1 ]
机构
[1] Univ Barcelona, Serv Cientif Tecn, E-08028 Barcelona, Spain
关键词
D O I
10.1051/analusis:2000280015
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The potential of Raman microspectroscopy as a powerful tool in characterizing solids will be demonstrated here with several applications on semiconductors and thin films. The method not only permits the identification of different localized microscopic regions, with a high spatial resolution and with no sample preparation, but also provides several basic information on the microstructure of solids.
引用
收藏
页码:15 / 22
页数:8
相关论文
共 41 条
[1]   MICRO-RAMAN SPECTROSCOPY FOR CHARACTERIZATION OF SEMICONDUCTOR-DEVICES [J].
ABSTREITER, G .
APPLIED SURFACE SCIENCE, 1991, 50 (1-4) :73-78
[2]   Effects of prior hydrogenation on the structure and properties of thermally nanocrystallized silicon layers [J].
Achiq, A ;
Rizk, R ;
Gourbilleau, F ;
Madelon, R ;
Garrido, B ;
Perez-Rodriguez, A ;
Morante, JR .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (11) :5797-5803
[3]   FTIR and micro-Raman spectra of polymer nanostructures under pressure [J].
Afanasyeva, NI ;
Belogorokhov, AI ;
Blank, VD ;
Jawhari, T ;
Ovchinnikov, AA .
MACROMOLECULAR SYMPOSIA, 1997, 119 :207-212
[4]   Micro-Raman spectroscopic measurements on carbon fibers [J].
Afanasyeva, NI ;
Jawhari, T ;
Klimenko, IV ;
Zhuravleva, TS .
VIBRATIONAL SPECTROSCOPY, 1996, 11 (01) :79-83
[5]   Stress-profile characterization and test-structure analysis of single and double ion-implanted LPCVD polycrystalline silicon [J].
Benitez, MA ;
Fonseca, L ;
Esteve, J ;
Benrakkad, MS ;
Morante, JR ;
Samitier, J ;
Schweitz, JA .
SENSORS AND ACTUATORS A-PHYSICAL, 1996, 54 (1-3) :718-723
[6]  
BENRAKKAD MS, 1994, MATER RES SOC SYMP P, V343, P609, DOI 10.1557/PROC-343-609
[7]   Dissolution behaviour of calcium phosphate coatings obtained by laser ablation [J].
Clèries, L ;
Fernández-Pradas, JM ;
Sardin, G ;
Morenza, JL .
BIOMATERIALS, 1998, 19 (16) :1483-1487
[8]   RAMAN-SPECTROSCOPY OF LOW-DIMENSIONAL SEMICONDUCTORS [J].
FAUCHET, PM ;
CAMPBELL, IH .
CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1988, 14 :S79-S101
[9]   Deposition of hydroxyapatite thin films by excimer laser ablation [J].
Fernandez-Pradas, JM ;
Sardin, G ;
Cleries, L ;
Serra, P ;
Ferrater, C ;
Morenza, JL .
THIN SOLID FILMS, 1998, 317 (1-2) :393-396
[10]   Texture and stress profile in thick polysilicon films suitable for fabrication of microstructures [J].
Furtsch, M ;
Offenberg, M ;
Vila, A ;
Cornet, A ;
Morante, JR .
THIN SOLID FILMS, 1997, 296 (1-2) :177-180