Real-time control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model

被引：19

作者：

Kildemo, M ^{[1
]}

Bulkin, P ^{[1
]}

Drevillon, B ^{[1
]}

Hunderi, O ^{[1
]}

机构：

[1] NORWEGIAN UNIV SCI & TECHNOL,DEPT PHYS,N-7034 TRONDHEIM,NORWAY

来源：

APPLIED OPTICS | 1997年 / 36卷 / 25期

关键词：

real-time control; ellipsometry; optical coatings; incoherent reflection; TRANSPARENT THIN-FILMS; SPECTROSCOPIC ELLIPSOMETRY; OPTICAL FUNCTIONS; GROWTH; SEMICONDUCTORS;

D O I：

10.1364/AO.36.006352

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Real-time control by multiwavelength phase-modulated ellipsometry (PME) of the growth of multilayer structures deposited on transparent glass is presented. The structures consist of plasma-deposited SiO2 and SiNx stacks. A model that takes into account incoherent reflection in the substrate is described and tested. A generalized feedback control method that incorporates the incoherent modeling of the transparent substrate is further applied to the growth of a Fabry-Perot and a standard quarter-wave filter, The resulting optical coatings characterized by spectroscopic PME and transmission measurements show a reproducible precision, with less than 1% error between target and measured spectral responses. (C) 1997 Optical Society of America.

引用

页码：6352 / 6359

页数：8

共 18 条

[1]

BULKIN PV, 1996, DEV OPTICAL COMPONEN, V2776, P126

[2] PHASE-MODULATED ELLIPSOMETRY FROM THE ULTRAVIOLET TO THE INFRARED - IN-SITU APPLICATION TO THE GROWTH OF SEMICONDUCTORS [J].

DREVILLON, B .

PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS, 1993, 27 (01) :1-87

[3] INSITU SPECTRAL ELLIPSOMETRY FOR REAL-TIME MEASUREMENT AND CONTROL [J].

DUNCAN, WM ;

HENCK, SA .

APPLIED SURFACE SCIENCE, 1993, 63 (1-4) :9-16

[4] Incoherent superposition in ellipsometric measurements [J].

Forcht, K ;

Gombert, A ;

Joerger, R ;

Kohl, M .

THIN SOLID FILMS, 1997, 302 (1-2) :43-50

[5] OPTICAL DISPERSION-RELATIONS FOR AMORPHOUS-SEMICONDUCTORS AND AMORPHOUS DIELECTRICS [J].

FOROUHI, AR ;

BLOOMER, I .

PHYSICAL REVIEW B, 1986, 34 (10) :7018-7026

[6] DATA-ANALYSIS FOR SPECTROSCOPIC ELLIPSOMETRY [J].

JELLISON, GE .

THIN SOLID FILMS, 1993, 234 (1-2) :416-422

[7] DETERMINATION OF THE OPTICAL FUNCTIONS OF TRANSPARENT GLASSES BY USING SPECTROSCOPIC ELLIPSOMETRY [J].

JELLISON, GE ;

SALES, BC .

APPLIED OPTICS, 1991, 30 (30) :4310-4315

[8] Parameterization of the optical functions of amorphous materials in the interband region [J].

Jellison, GE ;

Modine, FA .

APPLIED PHYSICS LETTERS, 1996, 69 (03) :371-373

[9] REAL-TIME MONITORING OF THE GROWTH OF TRANSPARENT THIN-FILMS BY SPECTROSCOPIC ELLIPSOMETRY [J].

KILDEMO, M ;

DREVILLON, B .

APPLIED PHYSICS LETTERS, 1995, 67 (07) :918-920

[10] Real time monitoring of the growth of transparent thin films by spectroscopic ellipsometry [J].

Kildemo, M ;

Drevillon, B .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (05) :1956-1960

← 1 2 →