DETERMINATION OF THE OPTICAL FUNCTIONS OF TRANSPARENT GLASSES BY USING SPECTROSCOPIC ELLIPSOMETRY

被引:33
作者
JELLISON, GE
SALES, BC
机构
[1] Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN
来源
APPLIED OPTICS | 1991年 / 30卷 / 30期
关键词
D O I
10.1364/AO.30.004310
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Two-channel spectroscopic polarization-modulation ellipsometry measurements have been made on four different glasses (fused SiO2, finely annealed BK-7, a lead-indium-phosphate glass, and a germanium-arsenic-selenium glass). We show that this technique is sensitive to thin surface layers and that these surface layers can be modeled by using the Bruggeman effective-medium theory with 50% glass and 50% voids. By correcting the experimental spectra for this surface layer, we determined the refractive index of the sample within an error of +/- 0.002 in the transparent region. For wavelength regions where the material is normally opaque, the ellipsometric data can be corrected for this overlayer, thereby increasing the accuracy of the determination of both the refractive index and the extinction coefficient.
引用
收藏
页码:4310 / 4315
页数:6
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