Comparative study of the ablation of materials by femtosecond and pico- or nanosecond laser pulses

被引:35
作者
Kononenko, TV
Konov, VI
Garnov, SV
Danielius, R
Piskarskas, A
Tamoshauskas, G
Dausinger, F
机构
[1] Russian Acad Sci, Inst Gen Phys, Moscow 117942, Russia
[2] Vilnius State Univ, Laser Res Ctr, LT-2040 Vilnius, Lithuania
[3] Inst Strahlwerkzeuge, D-70569 Stuttgart, Germany
关键词
D O I
10.1070/QE1999v029n08ABEH001560
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A series of studies was carried out on the ablation of steel, Si3N4 ceramic, and diamond in air by femtosecond (200 and 900 fs) pulses of different wavelengths (532 and 266 nm) and in a wide energy density range (1-10(3) J cm(-2)). The ablation rates were measured for different geometries of the irradiation surface [a shallow crater and a channel with a high (up to 10) aspect ratio]. The ablation rates (in a shallow crater) and the morphologies of the irradiated surface were compared for femtosecond and longer (220 ps, 7 ns) pulses. The role of the laser-generated plasma in the ablation of materials by subpicosecond pulses as well as the prospects for the practical application of ultrashort laser pulses in the processing of materials are analysed.
引用
收藏
页码:724 / 728
页数:5
相关论文
共 20 条
[1]  
Ageev V. P., 1988, Soviet Physics - Doklady, V33, P840
[2]  
BULLOV LL, 1990, POVERKHNOST, V6, P128
[3]   Generation of submicron surface gratings on LiNbO3 by ultrashort UV laser pulses [J].
Chen, K ;
Ihlemann, J ;
Simon, P ;
Baumann, I ;
Sohler, W .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1997, 65 (4-5) :517-518
[4]  
Chichkov BN, 1996, APPL PHYS A-MATER, V63, P109, DOI 10.1007/BF01567637
[5]   Short-pulse UV laser ablation of solid and liquid metals: Indium [J].
Gotz, T ;
Stuke, M .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1997, 64 (06) :539-543
[6]   NANOSECOND AND FEMTOSECOND EXCIMER-LASER ABLATION OF OXIDE CERAMICS [J].
IHLEMANN, J ;
SCHOLL, A ;
SCHMIDT, H ;
WOLFFROTTKE, B .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1995, 60 (04) :411-417
[7]  
KAUTEK W, 1994, PROC SPIE, V2207, P600, DOI 10.1117/12.184768
[8]   Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps [J].
Kautek, W ;
Kruger, J ;
Lenzner, M ;
Sartania, S ;
Spielmann, C ;
Krausz, F .
APPLIED PHYSICS LETTERS, 1996, 69 (21) :3146-3148
[9]   Processing of diamond and ceramics by picosecond/nanosecond laser pulses in IR-UV spectral range. [J].
Kononenko, TV ;
Garnov, SV ;
Pimenov, SM ;
Konov, VI ;
Dausinger, F .
HIGH-POWER LASER ABLATION, PTS 1-2, 1998, 3343 :458-464
[10]   Laser ablation of metals and ceramics in picosecond-nanosecond pulsewidth in the presence of different ambient atmospheres [J].
Kononenko, TV ;
Garnov, SV ;
Klimentov, SM ;
Konov, VI ;
Loubnin, EN ;
Dausinger, F ;
Raiber, A ;
Taut, C .
APPLIED SURFACE SCIENCE, 1997, 109 :48-51