Flexible Inorganic Piezoelectric Acoustic Nanosensors for Biomimetic Artificial Hair Cells

被引:209
作者
Lee, Hyun Soo [1 ,2 ]
Chung, Juyong [3 ,4 ]
Hwang, Geon-Tae [1 ]
Jeong, Chang Kyu [1 ]
Jung, Youngdo [5 ]
Kwak, Jun-Hyuk [5 ]
Kang, Hanmi [5 ]
Byun, Myunghwan [1 ]
Kim, Wan Doo [5 ]
Hur, Shin [5 ]
Oh, Seung-Ha [3 ]
Lee, Keon Jae [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
[2] Elect Mat Res Inst, Yongin 446797, Gyeonggi Do, South Korea
[3] Seoul Natl Univ, Coll Med, Dept Otorhinolaryngol, Seoul 110744, South Korea
[4] Ajou Univ, Dept Otolaryngol, Sch Med, Suwon 443380, Gyeonggi Do, South Korea
[5] Korea Inst Machinery & Mat, Dept Nat Inspired Nanoconvergence Syst, Taejon 304343, South Korea
基金
新加坡国家研究基金会;
关键词
flexible sensors; piezoelectricity; biomimetics; laser lift-off; artificial hair cells; THIN-FILM NANOGENERATOR; COCHLEAR IMPLANTS; VIBRATION; PRESTIN; MODELS; WAVES; SHIFT;
D O I
10.1002/adfm.201402270
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
For patients who suffer from sensorineural hearing loss by damaged or loss of hair cells in the cochlea, biomimetic artificial cochleas to remedy the disadvantages of existing implant systems have been intensively studied. Here, a new concept of an inorganic-based piezoelectric acoustic nanosensor (iPANS) for the purpose of a biomimetic artificial hair cell to mimic the functions of the original human hair cells is introduced. A trapezoidal silicone-based membrane (SM) mimics the function of the natural basilar membrane for frequency selectivity, and a flexible iPANS is fabricated on the SM utilizing a laser lift-off technology to overcome the brittle characteristics of inorganic piezoelectric materials. The vibration amplitude vs piezoelectric sensing signals are theoretically examined based on the experimental conditions by finite element analysis. The SM is successful at separating the audible frequency range of incoming sound, vibrating distinctively according to varying locations of different sound frequencies, thus allowing iPANS to convert tiny vibration displacement of approximate to 15 nm into an electrical sensing output of approximate to 55 V, which is close to the simulation results presented. This conceptual iPANS of flexible inorganic piezoelectric materials sheds light on the new fields of nature-inspired biomimetic systems using inherently high piezoelectric charge constants.
引用
收藏
页码:6914 / 6921
页数:8
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