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Numerical study of 3D unsteady melt convection during indu strial-scale CZ Si-crystal growth

被引：19
作者：
Evstratov, IY
Kalaev, VV
Zhmakin, AI
Makarov, YN
Abramov, AG
Ivanov, NG
Korsakov, AB
Smirnov, EM
Dornberger, E
Virbulis, J
Tomzig, E
von Ammon, W
机构：
[1] Semicond Technol Res Corp, Richmond, VA 23255 USA
[2] Soft Impact Ltd, St Petersburg 194156, Russia
[3] Leningrad State Tech Univ, St Petersburg 195251, Russia
[4] Wacker Siltron AG, D-84479 Burghausen, Germany
来源：
JOURNAL OF CRYSTAL GROWTH | 2002年 / 237卷 / 1-4 III期
关键词：
turbulent convection; magnetic fields; Czochralski method; silicon;
D O I：
10.1016/S0022-0248(01)02327-2
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
We present a computational model of 3D turbulent melt convection in Czochralski Si-crystal growth systems, based on the hybridization of Reynolds-averaged approach and large eddy simulation. The effect of superimposed magnetic field action on the melt flow is introduced in the model to account for the suppression of turbulent melt fluctuations. The model has been verified using experimental data for temperature in the melt and along the melt-crucible surface. Effects of axial magnetic field on the change in melt convection Lire studied in an industrial configuration. (C) 2002 Elsevier Science B.V. All rights reserved.
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收藏
页码：1757 / 1761
页数：5
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