Comparison between conductometric and layered SAW hydrogen gas sensor

被引：3

作者：

Ippolito, SJ ^{[1
]}

Kandasamy, S ^{[1
]}

Kalantar-zadeh, K ^{[1
]}

Wlodarski, W ^{[1
]}

Holland, A ^{[1
]}

机构：

[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic, Australia

来源：

MICROELECTRONICS: DESIGN, TECHNOLOGY, AND PACKAGING | 2004年 / 5274卷

关键词：

hydrogen; H-2; gas sensor; tungsten trioxide; WO3; conductometric; SAW; layered media;

D O I：

10.1117/12.522224

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A comparison between the performance of conductometric and layered surface acoustic wave (SAW) hydrogen sensors is presented. Both sensor structures employ an R.F. magnetron sputtered tungsten trioxide (WO3) thin film as a selective layer for hydrogen (H-2) sensing applications. The conductometric device is based on an alumina substrate, while the layered SAW device structure is fabricated on a 36degrees Y-cut, X-propagating LiTaO3 substrate with a zinc oxide (ZnO) guiding layer. The sensors were investigated for different operational temperatures and various concentrations of H-2 in synthetic air.

引用

页码：416 / 424

页数：9

共 17 条

[1]

[Anonymous], 1983, NONSTOICHIOMETRY DIF

[2] Hydrogen leak detection using an optical fibre sensor for aerospace applications [J].

Bévenot, X ;

Trouillet, A ;

Veillas, C ;

Gagnaire, H ;

Clément, M .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 67 (1-2) :57-67

[3] Investigation on the O3 sensitivity properties of WO3 thin films prepared by sol-gel, thermal evaporation and r.f. sputtering techniques [J].

Cantalini, C ;

Wlodarski, W ;

Li, Y ;

Passacantando, M ;

Santucci, S ;

Comini, E ;

Faglia, G ;

Sberveglieri, G .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 64 (1-3) :182-188

[4]

CARON JJ, 1998, FREQ CONTR S, P156

[5] SURFACE ACOUSTIC-WAVE HYDROGEN SENSOR [J].

DAMICO, A ;

PALMA, A ;

VERONA, E .

SENSORS AND ACTUATORS, 1982, 3 (01) :31-39

[6]

DAMICO A, 1982, IEEE ULTR S, P308

[7] A layered surface acoustic wave ZnO/LiTaO3 structure with a WO3 selective layer for hydrogen sensing [J].

Ippolito, SJ ;

Kandasamy, S ;

Kalantar-Zadeh, K ;

Trinchi, A ;

Wlodarski, W .

SENSOR LETTERS, 2003, 1 (01) :33-36

[8] Bilayer structure for hydrogen detection in a surface acoustic wave sensor system [J].

Jakubik, WP ;

Urbanczyk, MW ;

Kochowski, S ;

Bodzenta, J .

SENSORS AND ACTUATORS B-CHEMICAL, 2002, 82 (2-3) :265-271

[9] Simulating asynchronous, decentralized military command and control [J].

Lee, T ;

Ghosh, S .

IEEE COMPUTATIONAL SCIENCE & ENGINEERING, 1996, 3 (04) :69-79

[10]

MANY A, 1965, SEMICONDUCTOR SURFAC

← 1 2 →