Comparison between conductometric and layered SAW hydrogen gas sensor

被引：3

作者：

Ippolito, SJ ^{[1
]}

Kandasamy, S ^{[1
]}

Kalantar-zadeh, K ^{[1
]}

Wlodarski, W ^{[1
]}

Holland, A ^{[1
]}

机构：

[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic, Australia

来源：

MICROELECTRONICS: DESIGN, TECHNOLOGY, AND PACKAGING | 2004年 / 5274卷

关键词：

hydrogen; H-2; gas sensor; tungsten trioxide; WO3; conductometric; SAW; layered media;

D O I：

10.1117/12.522224

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A comparison between the performance of conductometric and layered surface acoustic wave (SAW) hydrogen sensors is presented. Both sensor structures employ an R.F. magnetron sputtered tungsten trioxide (WO3) thin film as a selective layer for hydrogen (H-2) sensing applications. The conductometric device is based on an alumina substrate, while the layered SAW device structure is fabricated on a 36degrees Y-cut, X-propagating LiTaO3 substrate with a zinc oxide (ZnO) guiding layer. The sensors were investigated for different operational temperatures and various concentrations of H-2 in synthetic air.

引用

页码：416 / 424

页数：9

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