A white-light interferometer using a lamp source and heterodyne detection with acousto-optic modulators

被引：23

作者：

Matsumoto, H ^{[1
]}

Hirai, A ^{[1
]}

机构：

[1] Natl Res Lab Metrol, Tsukuba, Ibaraki 3058563, Japan

来源：

OPTICS COMMUNICATIONS | 1999年 / 170卷 / 4-6期

关键词：

white-light interferometry; heterodyne interferometry; acousto-optic modulator; positioning;

D O I：

10.1016/S0030-4018(99)00471-X

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A heterodyne technique for white-light interferometer with a lamp source, which uses two acousto-optic modulators, is developed for high-sensitivity detection of weak light. By using converging input beams input into a Michelson interferometer with spherical mirrors, the spectral dependence of the modulators is canceled, and the white-light heterodyne interference fringes are generated at 200 kHz. Using a tandem interferometer, the object surface which has a low surface reflectivity of less than 10(-4) was detected with a good, signal-to-noise ratio. (C) 1999 Elsevier Science B.V. All rights reserved.

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收藏

页码：217 / 220

页数：4

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