Distance measurements using a noisy white light interferometer

被引:4
作者
Ben-Chorin, M [1 ]
Chuartzman, S [1 ]
Prior, Y [1 ]
机构
[1] Weizmann Inst Sci, IL-76100 Rehovot, Israel
关键词
D O I
10.1063/1.121862
中图分类号
O59 [应用物理学];
学科分类号
摘要
We describe a method for interferometric distance measurements in the presence of phase noise. The method is based on the beating between white light and a reference beam that travel along the same path through the interferometer. Since both the reference and the white light suffer the same phase noise, the envelope of the high frequency fringes is not affected by the noise. By measuring the signal variance? we recover the envelope while averaging out the high frequency fringes. We demonstrate the usefulness of the method for surface profilometers. (C) 1998 American Institute of Physics.
引用
收藏
页码:581 / 583
页数:3
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